Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7397940 | Object positioning method for a lithographic projection apparatus | Marcus J. H. Willems van Dijk, Thomas Josephus Maria Castenmiller, Andreas Ariens | 2008-07-08 |
| 6987557 | Enhanced lithographic displacement measurement system | Wouter Onno Pril, Robert F. Dillon, Philip D. Henshaw | 2006-01-17 |
| 6853440 | Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination | Marcel Hendrikus Maria Beems, Hendricus Johannes Maria Meijer, Daniel N. Galburt, Erik Roelof Loopstra | 2005-02-08 |
| 6747729 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition | Wouter Onno Pril, Philip D. Henshaw, Marcel Hendrikus Maria Beems | 2004-06-08 |
| 6498350 | Crash prevention in positioning apparatus for use in lithographic projection apparatus | Yim-Bun Patrick Kwan, Andreas Ariens, Edwin Johan Buis, Jan Frederick Hoogkamp, Robert-Han Munnig Schmidt | 2002-12-24 |
| 6392738 | Lithographic projection apparatus | Aschwin Lodewijk Hendricus Johannes Van Meer, Franciscus Adrianus Gerardus Klaassen | 2002-05-21 |