Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7675201 | Lithographic apparatus with planar motor driven support | Hans Butler | 2010-03-09 |
| 7592760 | Lithographic apparatus and device manufacturing method | Hans Butler | 2009-09-22 |
| 7420299 | Lithographic apparatus and device manufacturing method | Hans Butler | 2008-09-02 |
| 7352149 | Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus | Hans Butler | 2008-04-01 |
| 6392738 | Lithographic projection apparatus | Engelbertus A. F. van de Pasch, Aschwin Lodewijk Hendricus Johannes Van Meer | 2002-05-21 |