Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5682226 | Photomask, an exposure method and a projection exposure apparatus | Masaya Komatsu | 1997-10-28 |
| 5592259 | Photomask, an exposure method and a projection exposure apparatus | Masaya Komatsu | 1997-01-07 |
| 4883345 | Projection optical apparatus | Hiroshi Tanaka | 1989-11-28 |
| 4871237 | Method and apparatus for adjusting imaging performance of projection optical apparatus | Koichi Ohno | 1989-10-03 |
| 4734746 | Exposure method and system for photolithography | Kazuo Ushida, Kazuaki Suzuki, Toshio Matsuura, Kyoichi Suwa, Koichi Matsumoto | 1988-03-29 |
| 4666273 | Automatic magnification correcting system in a projection optical apparatus | Hisayuki Shimizu, Hiroshi Tanaka, Kyoichi Suwa | 1987-05-19 |
| 4624551 | Light irradiation control method for projection exposure apparatus | Masashi Okada | 1986-11-25 |
| 4592625 | Double-conjugate maintaining optical system | Makoto Uehara, Kyoichi Suwa | 1986-06-03 |
| 4498762 | Projection type exposure apparatus | Makoto Uehara | 1985-02-12 |