Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9079808 | Gas generator, gas generator holder and method for manufacturing gas generator holder | Shigeru Maeda, Eiji Komatsu, Masahiro Kato, Kenichirou Yamashita | 2015-07-14 |
| 7876118 | Test equipment | Satoshi Iwamoto, Shigeki Takizawa, Koichi Yatsuka | 2011-01-25 |
| 6366341 | Exposure method and exposure apparatus | Akinori Shirato, Kazuhiko Hori | 2002-04-02 |
| 5995199 | Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask | Tadaaki Shinozaki, Nobutaka Fujimori, Toshinobu Morioka | 1999-11-30 |
| 5985496 | Exposure method and apparatus | Kei Nara | 1999-11-16 |
| 5973766 | Exposure method and exposure device | Nobutaka Fujimori, Toshinobu Morioka, Kei Nara | 1999-10-26 |
| 5912726 | Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system | Manabu Toguchi, Kei Nara, Masaichi Murakami, Nobutaka Fujimori | 1999-06-15 |
| 5774240 | Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques | Akihiro Goto, Takashi Genma, Yutaka Ichihara, Nobutaka Magome, Naomasa Shiraishi +2 more | 1998-06-30 |
| 5617211 | Exposure apparatus | Kei Nara, Muneyasu Yokota, Yukio Kakizaki, Yoshio Fukami, Seiji Miyazaki +1 more | 1997-04-01 |
| 5528390 | Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques | Akihiro Goto, Takashi Genma, Yutaka Ichihara, Nobutaka Magome, Naomasa Shiraishi +2 more | 1996-06-18 |
| 5523841 | Distance measuring apparatus using multiple switched interferometers | Kei Nara | 1996-06-04 |
| 5504596 | Exposure method and apparatus using holographic techniques | Akihiro Goto, Takashi Gemma, Yutaka Ichihara, Nobutaka Magome, Naomasa Shiraishi +1 more | 1996-04-02 |
| 5442418 | Exposure method | Masaichi Murakami, Muneyasu Yokota, Atsuyuki Aoki | 1995-08-15 |
| 5295086 | Method of producing noise free frequency spectrum signals | Mineo Kumazawa, Yuichi Imanishi | 1994-03-15 |
| 4801208 | Projection type exposing apparatus | Kinya Katoh | 1989-01-31 |
| RE32795 | Exposure apparatus for production of integrated circuit | Kyoichi Suwa, Hisayuki Shimizu, Akikazu Tanimoto | 1988-12-06 |
| 4734746 | Exposure method and system for photolithography | Kazuo Ushida, Satoru Anzai, Kazuaki Suzuki, Kyoichi Suwa, Koichi Matsumoto | 1988-03-29 |
| 4723221 | Method for manufacturing semiconductor device and apparatus therefor | Satoru Shikata | 1988-02-02 |
| 4702606 | Position detecting system | Seiro Murakami, Yuji Imai, Kazuya Ohta, Akikazu Tanimoto | 1987-10-27 |
| 4699515 | Process of transfer of mask pattern onto substrate and apparatus for alignment therebetween | Akikazu Tanimoto, Kyoichi Suwa | 1987-10-13 |
| 4677301 | Alignment apparatus | Akikazu Tanimoto, Seiro Murakami, Makoto Uehara, Kyoichi Suwa | 1987-06-30 |
| 4655598 | Position detection method and apparatus | Seiro Murakami, Yuji Imai, Kazuya Ohta | 1987-04-07 |
| 4566795 | Alignment apparatus | Kyoichi Suwa | 1986-01-28 |
| 4465368 | Exposure apparatus for production of integrated circuit | Kyoichi Suwa, Hisayuki Shimizu, Akikazu Tanimoto | 1984-08-14 |