Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538724 | Exposure apparatus | Manabu Toguchi | 2003-03-25 |
| 6204912 | Exposure method, exposure apparatus, and mask | Makoto Tsuchiya, Kei Nara, Manabu Toguchi, Masami Seki | 2001-03-20 |
| 5995199 | Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask | Tadaaki Shinozaki, Toshio Matsuura, Toshinobu Morioka | 1999-11-30 |
| 5973766 | Exposure method and exposure device | Toshio Matsuura, Toshinobu Morioka, Kei Nara | 1999-10-26 |
| 5912726 | Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system | Manabu Toguchi, Kei Nara, Masaichi Murakami, Toshio Matsuura | 1999-06-15 |
| H1733 | Exposure method | Kei Nara, Masaichi Murakami | 1998-06-02 |
| 5565988 | Alignment method and apparatus | Kei Nara | 1996-10-15 |