Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6288772 | Scanning exposure method and scanning type exposure apparatus | Masamitsu Yanagihara | 2001-09-11 |
| 5995199 | Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask | Nobutaka Fujimori, Toshio Matsuura, Toshinobu Morioka | 1999-11-30 |
| 5532822 | Method of measuring orthogonality of stage unit | Manabu Toguchi, Kunihiro Kawae, Kazuo Murano | 1996-07-02 |