Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641981 | Exposure method, exposure apparatus, and device manufacturing method | Kenichirou Kaneko, Seiji Fujitsuka | 2003-11-04 |
| 6512572 | Exposure apparatus, method, and storage medium | — | 2003-01-28 |
| 6104471 | Exposure apparatus and method wherein the magnification of the projection optical system compensates for physical changes in the substrate | Muneyasu Yokota | 2000-08-15 |
| 5995199 | Position measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure mask | Tadaaki Shinozaki, Nobutaka Fujimori, Toshio Matsuura | 1999-11-30 |
| 5973766 | Exposure method and exposure device | Toshio Matsuura, Nobutaka Fujimori, Kei Nara | 1999-10-26 |