Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6104471 | Exposure apparatus and method wherein the magnification of the projection optical system compensates for physical changes in the substrate | Toshinobu Morioka | 2000-08-15 |
| 5777722 | Scanning exposure apparatus and method | Seiji Miyazaki, Tsuyoshi Narabe, Kei Nara, Tomohide Hamada, Kazuaki Saiki +1 more | 1998-07-07 |
| 5617211 | Exposure apparatus | Kei Nara, Toshio Matsuura, Yukio Kakizaki, Yoshio Fukami, Seiji Miyazaki +1 more | 1997-04-01 |
| 5442418 | Exposure method | Masaichi Murakami, Toshio Matsuura, Atsuyuki Aoki | 1995-08-15 |
| 5298761 | Method and apparatus for exposure process | Atsuyuki Aoki | 1994-03-29 |