Patents per Year
Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5978094 | Alignment device and method based on imaging characteristics of the image pickup system | Kei Nara, Masamitsu Yanagihara | 1999-11-02 |
| 5850279 | Alignment method, projection exposure method, and projection exposure apparatus | Kei Nara, Masaki Kato, Kinya Kato | 1998-12-15 |
| 5798822 | Exposure apparatus | Seiji Miyazaki, Hiroshi Shirasu, Kazuaki Saiki | 1998-08-25 |
| 5777722 | Scanning exposure apparatus and method | Seiji Miyazaki, Kei Nara, Tomohide Hamada, Kazuaki Saiki, Hideji Goto +1 more | 1998-07-07 |
| 5760881 | Exposure apparatus with light shielding portion for plotosensitive elements | Seiji Miyazaki, Kei Nara, Hiroshi Shirasu | 1998-06-02 |
| 5625436 | Scanning type exposure apparatus and exposure method | Masamitsu Yanagihara, Susumu Mori, Tsuyoshi Naraki, Masami Seki, Seiji Miyazaki +1 more | 1997-04-29 |
| 5617211 | Exposure apparatus | Kei Nara, Toshio Matsuura, Muneyasu Yokota, Yukio Kakizaki, Yoshio Fukami +1 more | 1997-04-01 |