| 5978094 |
Alignment device and method based on imaging characteristics of the image pickup system |
Kei Nara, Masamitsu Yanagihara |
1999-11-02 |
| 5850279 |
Alignment method, projection exposure method, and projection exposure apparatus |
Kei Nara, Masaki Kato, Kinya Kato |
1998-12-15 |
| 5798822 |
Exposure apparatus |
Seiji Miyazaki, Hiroshi Shirasu, Kazuaki Saiki |
1998-08-25 |
| 5777722 |
Scanning exposure apparatus and method |
Seiji Miyazaki, Kei Nara, Tomohide Hamada, Kazuaki Saiki, Hideji Goto +1 more |
1998-07-07 |
| 5760881 |
Exposure apparatus with light shielding portion for plotosensitive elements |
Seiji Miyazaki, Kei Nara, Hiroshi Shirasu |
1998-06-02 |
| 5625436 |
Scanning type exposure apparatus and exposure method |
Masamitsu Yanagihara, Susumu Mori, Tsuyoshi Naraki, Masami Seki, Seiji Miyazaki +1 more |
1997-04-29 |
| 5617211 |
Exposure apparatus |
Kei Nara, Toshio Matsuura, Muneyasu Yokota, Yukio Kakizaki, Yoshio Fukami +1 more |
1997-04-01 |