Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791223 | Substrate bonding apparatus and substrate bonding method | Isao Sugaya, Eiji ARIIZUMI, Yoshiaki Kito, Mikio Ushijima, Masanori ARAMATA +4 more | 2023-10-17 |
| 10627725 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Yasuo Aoki, Yoshihiko Kudo | 2020-04-21 |
| 10228625 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Yasuo Aoki, Yoshihiko Kudo | 2019-03-12 |
| 9539800 | Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate | Yoshiaki Kito, Masahiro Yoshihashi, Daisuke Yuki, Kazuhiro Suzuki, Isao Sugaya | 2017-01-10 |
| 9366974 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Yasuo Aoki, Yoshihiko Kudo | 2016-06-14 |
| 8704431 | Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method | Yasuo Aoki, Motoo Koyama, Takayuki Kikuchi | 2014-04-22 |
| 8699001 | Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method | Yasuo Aoki, Tomohide Hamada, Manabu Toguchi | 2014-04-15 |
| 8531093 | Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method | Yasuo Aoki, Motoo Koyama, Takayuki Kikuchi | 2013-09-10 |
| 7372543 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2008-05-13 |
| 7372544 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2008-05-13 |
| 7023527 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2006-04-04 |
| 6811953 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Hitoshi Hatada, Masaki Kato, Motoo Koyama, Masahiro Iguchi | 2004-11-02 |
| 6795169 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2004-09-21 |
| 6570641 | Projection exposure apparatus | Tomohide Hamada, Yukio Kakizaki, Kinya Kato | 2003-05-27 |
| 6556278 | Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2003-04-29 |
| 6351305 | Exposure apparatus and exposure method for transferring pattern onto a substrate | Masahi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 2002-02-26 |
| 6317196 | Projection exposure apparatus | Tomohide Hamada, Yukio Kakizaki, Kinya Kats | 2001-11-13 |
| 6266131 | Exposure apparatus | Tomohide Hamada | 2001-07-24 |
| 6049372 | Exposure apparatus | Kinya Kato, Yukio Kakizaki, Kei Nara | 2000-04-11 |
| 5923409 | Scanning-type exposure apparatus including a vertically disposed holder surface and method thereof | Tomohide Hamada | 1999-07-13 |
| 5920378 | Projection exposure apparatus | Masaichi Murakami, Tomohide Hamada, Kazuaki Saiki, Susumu Mori | 1999-07-06 |
| 5798822 | Exposure apparatus | Seiji Miyazaki, Kazuaki Saiki, Tsuyoshi Narabe | 1998-08-25 |
| 5774240 | Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques | Akihiro Goto, Takashi Genma, Yutaka Ichihara, Nobutaka Magome, Naomasa Shiraishi +2 more | 1998-06-30 |
| 5760881 | Exposure apparatus with light shielding portion for plotosensitive elements | Seiji Miyazaki, Kei Nara, Tsuyoshi Narabe | 1998-06-02 |
| 5729331 | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus | Masashi Tanaka, Masato Kumazawa, Kinya Kato, Masaki Kato, Hiroshi Chiba | 1998-03-17 |