Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9539800 | Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate | Yoshiaki Kito, Hiroshi Shirasu, Daisuke Yuki, Kazuhiro Suzuki, Isao Sugaya | 2017-01-10 |
| 9240339 | Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus | Hidehiro Maeda | 2016-01-19 |
| 8932432 | Substrate separating apparatus, load lock apparatus, substrate bonding apparatus, substrate separating method, and manufacturing method of a semiconductor apparatus | Keiichi Tanaka | 2015-01-13 |
| 8570704 | Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus | Hidehiro Maeda | 2013-10-29 |
| 6524003 | Linear motion guiding apparatus | Hidekazu Michioka, Katsuya Iida, Hiroaki Mochizuki, Tadashi Hirokawa | 2003-02-25 |
| 6510660 | Damping device | Hidekazu Michioka, Masashi Konomoto, Yoshihito Watanabe | 2003-01-28 |
| 6305846 | Linear motion guiding apparatus | Hidekazu Michioka, Katsuya Iida, Hiroaki Mochizuki, Tadashi Hirokawa | 2001-10-23 |
| 6132093 | Linear motion guiding apparatus | Hidekazu Michioka, Katsuya Iida, Hiroaki Mochizuki, Tadashi Hirokawa | 2000-10-17 |