Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165902 | Substrate bonding apparatus and substrate bonding method | Hajime MITSUISHI, Atsushi Kamashita, Masashi Okada, Minoru Fukuda, Hidehiro Maeda | 2024-12-10 |
| 12107068 | Method and device for manufacturing stacked substrate | Hajime MITSUISHI | 2024-10-01 |
| 12100667 | Apparatus for stacking substrates and method for the same | Kazuya Okamoto, Hajime MITSUISHI, Minoru Fukuda | 2024-09-24 |
| 12080554 | Bonding method, bonding device, and holding member | Hajime MITSUISHI, Minoru Fukuda, Masaki Tsunoda, Hidehiro Maeda, Ikuhiro Kuwano | 2024-09-03 |
| 11842905 | Stacked substrate manufacturing method, stacked substrate manufacturing apparatus, stacked substrate manufacturing system, and substrate processing apparatus | Hajime MITSUISHI | 2023-12-12 |
| 11823935 | Stacking apparatus and stacking method | Hajime MITSUISHI, Minoru Fukuda | 2023-11-21 |
| 11791223 | Substrate bonding apparatus and substrate bonding method | Eiji ARIIZUMI, Yoshiaki Kito, Mikio Ushijima, Masanori ARAMATA, Naoto KIRIBE +4 more | 2023-10-17 |
| 11362059 | Manufacturing method and manufacturing apparatus for stacked substrate, and program | Atsushi Kamashita, Hajime MITSUISHI, Minoru Fukuda | 2022-06-14 |
| 11211338 | Apparatus for stacking substrates and method for the same | Kazuya Okamoto, Hajime MITSUISHI, Minoru Fukuda | 2021-12-28 |
| 11004686 | Bonding method, bonding device, and holding member | Hajime MITSUISHI, Minoru Fukuda, Masaki Tsunoda, Hidehiro Maeda, Ikuhiro Kuwano | 2021-05-11 |
| 10825707 | Stacking apparatus and stacking method | Hajime MITSUISHI, Minoru Fukuda | 2020-11-03 |
| 10483212 | Apparatus for stacking substrates and method for the same | Kazuya Okamoto, Hajime MITSUISHI, Minoru Fukuda | 2019-11-19 |
| 10424557 | Substrate bonding apparatus and substrate bonding method | Hajime MITSUISHI, Minoru Fukuda | 2019-09-24 |
| 10182190 | Light detecting apparatus, image capturing apparatus and image sensor | Sota Nakanishi, Wataru Funamizu, Kazuya Okamoto, Shiro Tsunai | 2019-01-15 |
| 10026768 | Detector, detector with lock-in amplifier, substrate, and method for manufacturing a detector | Osamu SARUWATARI, Shigeru Aoki, Kazuya Okamoto, Masashi Okada, Hiroshi Ohki | 2018-07-17 |
| 9919508 | Substrate aligning apparatus, substrate bonding apparatus, substrate aligning method and substrate bonding method | Kazuya Okamoto | 2018-03-20 |
| 9539800 | Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrate | Yoshiaki Kito, Hiroshi Shirasu, Masahiro Yoshihashi, Daisuke Yuki, Kazuhiro Suzuki | 2017-01-10 |
| 9159640 | Semiconductor device and method for manufacturing the semiconductor device | — | 2015-10-13 |
| 9054140 | Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devices | Junichi Chonan, Hidehiro Maeda | 2015-06-09 |
| 8878358 | Semiconductor device | — | 2014-11-04 |
| 8856722 | System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates | Takahiro Horikoshi, Kazuya Okamoto | 2014-10-07 |
| 8436465 | Semiconductor device and method for manufacturing the semiconductor device | — | 2013-05-07 |
| 8436680 | Multi-layered semiconductor apparatus | Kazuya Okamoto | 2013-05-07 |
| 8370789 | System for semiconductor device, method for manufacturing semiconductor device, semiconductor device and method for bonding substrates | Takahiro Horikoshi, Kazuya Okamoto | 2013-02-05 |
| 8299848 | Multi-layered semiconductor apparatus | Kazuya Okamoto | 2012-10-30 |