Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10310383 | Exposure apparatus, exposure method, and device manufacturing method | — | 2019-06-04 |
| 9753378 | Exposure apparatus, exposure method, and device manufacturing method | — | 2017-09-05 |
| 9054140 | Substrate holder system, substrate holder, fastening mechanism, substrate bonding apparatus and method for manufacturing devices | Isao Sugaya, Hidehiro Maeda | 2015-06-09 |
| 9041902 | Exposure apparatus, exposure method, and device manufacturing method | — | 2015-05-26 |