Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165902 | Substrate bonding apparatus and substrate bonding method | Isao Sugaya, Atsushi Kamashita, Masashi Okada, Minoru Fukuda, Hidehiro Maeda | 2024-12-10 |
| 12107068 | Method and device for manufacturing stacked substrate | Isao Sugaya | 2024-10-01 |
| 12100667 | Apparatus for stacking substrates and method for the same | Isao Sugaya, Kazuya Okamoto, Minoru Fukuda | 2024-09-24 |
| 12080554 | Bonding method, bonding device, and holding member | Isao Sugaya, Minoru Fukuda, Masaki Tsunoda, Hidehiro Maeda, Ikuhiro Kuwano | 2024-09-03 |
| 11842905 | Stacked substrate manufacturing method, stacked substrate manufacturing apparatus, stacked substrate manufacturing system, and substrate processing apparatus | Isao Sugaya | 2023-12-12 |
| 11823935 | Stacking apparatus and stacking method | Isao Sugaya, Minoru Fukuda | 2023-11-21 |
| 11791223 | Substrate bonding apparatus and substrate bonding method | Isao Sugaya, Eiji ARIIZUMI, Yoshiaki Kito, Mikio Ushijima, Masanori ARAMATA +4 more | 2023-10-17 |
| 11362059 | Manufacturing method and manufacturing apparatus for stacked substrate, and program | Isao Sugaya, Atsushi Kamashita, Minoru Fukuda | 2022-06-14 |
| 11211338 | Apparatus for stacking substrates and method for the same | Isao Sugaya, Kazuya Okamoto, Minoru Fukuda | 2021-12-28 |
| 11004686 | Bonding method, bonding device, and holding member | Isao Sugaya, Minoru Fukuda, Masaki Tsunoda, Hidehiro Maeda, Ikuhiro Kuwano | 2021-05-11 |
| 10825707 | Stacking apparatus and stacking method | Isao Sugaya, Minoru Fukuda | 2020-11-03 |
| 10483212 | Apparatus for stacking substrates and method for the same | Isao Sugaya, Kazuya Okamoto, Minoru Fukuda | 2019-11-19 |
| 10424557 | Substrate bonding apparatus and substrate bonding method | Isao Sugaya, Minoru Fukuda | 2019-09-24 |