Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791223 | Substrate bonding apparatus and substrate bonding method | Isao Sugaya, Eiji ARIIZUMI, Yoshiaki Kito, Masanori ARAMATA, Naoto KIRIBE +4 more | 2023-10-17 |
| 6768124 | Reticle-focus detector, and charged-particle-beam microlithography apparatus and methods comprising same | Kazuaki Suzuki | 2004-07-27 |