Issued Patents All Time
Showing 25 most recent of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774864 | Carrier device, exposure apparatus, exposure method, manufacturing method of flat-panel display, device manufacturing method, and carrying method | — | 2023-10-03 |
| 11520242 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | — | 2022-12-06 |
| 11402762 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2022-08-02 |
| 11187999 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2021-11-30 |
| 11126094 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | Atsushi Hara, Takachika SHIMOYAMA, Toru Kawaguchi, Katsuhiro SHIMATAKE, Iori NODA | 2021-09-21 |
| 10983438 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | — | 2021-04-20 |
| 10935894 | Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object | — | 2021-03-02 |
| 10852647 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method , and device manufacturing method | — | 2020-12-01 |
| 10802407 | Exposure apparatus, exposure method, manufacturing method of flat-panel display, and device manufacturing method | — | 2020-10-13 |
| 10782619 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2020-09-22 |
| 10752449 | Object carrier device, exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, object carrying method, and exposure method | Masayuki Nagashima, Takahiro Yamanaka | 2020-08-25 |
| 10725389 | Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method | — | 2020-07-28 |
| 10670977 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2020-06-02 |
| 10649348 | Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method | — | 2020-05-12 |
| 10627725 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Hiroshi Shirasu, Yoshihiko Kudo | 2020-04-21 |
| 10564548 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | — | 2020-02-18 |
| 10534277 | Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, and device manufacturing method | — | 2020-01-14 |
| 10520834 | Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object | — | 2019-12-31 |
| 10514616 | Movable body apparatus, exposure apparatus and device manufacturing method | — | 2019-12-24 |
| 10409176 | Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method | — | 2019-09-10 |
| 10228625 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Hiroshi Shirasu, Yoshihiko Kudo | 2019-03-12 |
| 9977345 | Movable body apparatus, exposure apparatus and device manufacturing method | — | 2018-05-22 |
| 9921496 | Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method | — | 2018-03-20 |
| 9500963 | Movable body apparatus, exposure apparatus and device manufacturing method | — | 2016-11-22 |
| 9366974 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Hiroshi Shirasu, Yoshihiko Kudo | 2016-06-14 |