Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392042 | Exposure apparatus and exposure method, and flat panel display manufacturing method | — | 2022-07-19 |
| 11126094 | Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method | Yasuo Aoki, Atsushi Hara, Toru Kawaguchi, Katsuhiro SHIMATAKE, Iori NODA | 2021-09-21 |
| 10585355 | Exposure apparatus and exposure method, and flat panel display manufacturing method | — | 2020-03-10 |