Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8704431 | Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method | Hiroshi Shirasu, Yasuo Aoki, Takayuki Kikuchi | 2014-04-22 |
| 8531093 | Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method | Hiroshi Shirasu, Yasuo Aoki, Takayuki Kikuchi | 2013-09-10 |
| 7573019 | Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method | — | 2009-08-11 |
| 6811953 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Hitoshi Hatada, Masaki Kato, Hiroshi Shirasu, Masahiro Iguchi | 2004-11-02 |
| 6750951 | Optical apparatus, exposure apparatus, and exposure method | Masaki Kato, Hidefumi Shibano | 2004-06-15 |
| 6489624 | Apparatus and methods for detecting thickness of a patterned layer | Yoshijiro Ushio, Takehiko Ueda, Eiji Matsukawa | 2002-12-03 |
| 6339219 | Radiation imaging device and radiation detector | Tohru Ishizuya | 2002-01-15 |
| 6102775 | Film inspection method | Yoshijiro Ushio | 2000-08-15 |
| 5949503 | Reflective liquid crystal spatial light modulator and projection apparatus comprising same | Hideaki Shimomura | 1999-09-07 |
| 5909307 | Optical system for infrared camera | — | 1999-06-01 |
| 5839808 | Projection optical system | Yuji Manabe, Ikuo Mori | 1998-11-24 |
| 5793473 | Projection optical apparatus for projecting a mask pattern onto the surface of a target projection object and projection exposure apparatus using the same | Yutaka Ichihara | 1998-08-11 |