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Image processing apparatus, image processing method, recording method, and recording medium |
Yutaka Ichihara |
2014-07-29 |
| 8675048 |
Image processing apparatus, image processing method, recording method, and recording medium |
Yutaka Ichihara |
2014-03-18 |
| 7203564 |
Treatment condition decision method, treatment condition decision system, treatment system, treatment condition decision calculator program, program recording medium, and semiconductor device manufacturing method |
Tatsuya Senga |
2007-04-10 |
| 7108580 |
Method and device for simulation, method and device for polishing, method and device for preparing control parameters or control program, polishing system, recording medium, and method of manufacturing semiconductor device |
Kiyoshi Iizuka |
2006-09-19 |
| 7052920 |
Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
Takehiko Ueda |
2006-05-30 |
| 6679756 |
Method and apparatus for monitoring polishing state, polishing device, process wafer, semiconductor device, and method of manufacturing semiconductor device |
Akira Ishikawa |
2004-01-20 |
| 6670200 |
Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
Takehiko Ueda |
2003-12-30 |
| 6489624 |
Apparatus and methods for detecting thickness of a patterned layer |
Takehiko Ueda, Eiji Matsukawa, Motoo Koyama |
2002-12-03 |
| 6458014 |
Polishing body, polishing apparatus, polishing apparatus adjustment method, polished film thickness or polishing endpoint measurement method, and semiconductor device manufacturing method |
Akira Ihsikawa, Tatsuya Senga, Akira Miyaji |
2002-10-01 |
| 6271047 |
Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
Takehiko Ueda |
2001-08-07 |
| 6108096 |
Light absorption measurement apparatus and methods |
Toru Nakamura, Sumito Shimizu, Tetsuya Oshino |
2000-08-22 |
| 6102775 |
Film inspection method |
Motoo Koyama |
2000-08-15 |
| 5933181 |
Photographic recording apparatus |
Yukihiko Shimizu, Kinya Ueda, Masahiro Furuta, Takehiko Ueda |
1999-08-03 |
| 5673114 |
Apparatus for measuring optical absorption of sample and sample holder applicable to the same |
— |
1997-09-30 |
| 5641597 |
Circuit forming method and apparatus therefor |
Tatsuo Niwa |
1997-06-24 |
| 5148306 |
Electrochromic device with specific resistances |
Masayuki Yamada |
1992-09-15 |