Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909774 | Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems | Katsuhiko Murakami, Hiroyuki Kondo, Katsumi Sugisaki, Masaki Yamamoto | 2005-06-21 |
| 6878042 | Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the element | — | 2005-04-12 |
| 6859337 | Optical-element mountings exhibiting reduced deformation of optical elements held thereby | Takeshi Okuyama | 2005-02-22 |
| 6816568 | X-ray projection exposure device, X-ray projection exposure method, and semiconductor device | — | 2004-11-09 |
| 6376849 | Charged particle beam exposure apparatus mask and charged particle beam exposure apparatus | — | 2002-04-23 |
| 6356616 | Apparatus and methods for detecting position of an object along an axis | — | 2002-03-12 |
| 6240158 | X-ray projection exposure apparatus with a position detection optical system | — | 2001-05-29 |
| 6218674 | Electron beam projection exposure apparatus | — | 2001-04-17 |
| 6208707 | X-ray projection exposure apparatus | — | 2001-03-27 |
| 6108096 | Light absorption measurement apparatus and methods | Yoshijiro Ushio, Toru Nakamura, Sumito Shimizu | 2000-08-22 |
| 6069937 | Illumination apparatus | Hiroyuki Kondo | 2000-05-30 |
| 5677939 | Illuminating apparatus | — | 1997-10-14 |