Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571340 | Method and device for measuring wavefront using diffraction grating, and exposure method and device | Katsura Otaki, Takashi Gemma | 2020-02-25 |
| 10288489 | Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction | Katsura Otaki, Takashi Gemma | 2019-05-14 |
| 6909774 | Apparatus and methods for surficial milling of selected regions on surfaces of multilayer-film reflective mirrors as used in X-ray optical systems | Tetsuya Oshino, Katsuhiko Murakami, Hiroyuki Kondo, Masaki Yamamoto | 2005-06-21 |
| 6507641 | X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same | Hiroyuki Kondo, Katsuhiko Murakami, Masayuki Shiraishi | 2003-01-14 |