Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571340 | Method and device for measuring wavefront using diffraction grating, and exposure method and device | Katsura Otaki, Katsumi Sugisaki | 2020-02-25 |
| 10288489 | Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction | Katsura Otaki, Katsumi Sugisaki | 2019-05-14 |
| 7868997 | Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method | Mikihiko Ishii, Yutaka Ichihara | 2011-01-11 |
| 7843550 | Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method | Mikihiko Ishii, Yutaka Ichihara | 2010-11-30 |
| 6456382 | Interferometer that measures aspherical surfaces | Hiroshi Ichihara, Shigeru Nakayama, Hajime Ichikawa | 2002-09-24 |
| 6344898 | Interferometric apparatus and methods for measuring surface topography of a test surface | Hiroshi Ichihara, Hajime Ichikawa, Shigeru Nakayama, Bruce Jacobsen | 2002-02-05 |
| 6008904 | Apparatus and methods for detecting and correcting distortion of interference fringes | Mikihiko Ishii, Katsuya Miyoshi | 1999-12-28 |
| 5898501 | Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens | Jun Suzuki, Yutaka Ichihara | 1999-04-27 |
| 5563706 | Interferometric surface profiler with an alignment optical member | Masato Shibuya, Yutaka Ichihara, Shuji Toyonaga, Keiji Inada | 1996-10-08 |
| 5561525 | Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop | Shuji Toyonaga | 1996-10-01 |
| 5504596 | Exposure method and apparatus using holographic techniques | Akihiro Goto, Yutaka Ichihara, Nobutaka Magome, Naomasa Shiraishi, Hiroshi Shirasu +1 more | 1996-04-02 |
| 5039223 | Interferometer for measuring aspherical form with the utilization of computer generated hologram | Takuji Satoh, Takashi Yokokura | 1991-08-13 |
| 4848907 | Method of and apparatus for analyzing interference fringes | Takashi Yokokura, Satoh Takuji | 1989-07-18 |
| 4812042 | Holographic interferometer | Takashi Yokokura, Takuji Satoh | 1989-03-14 |
| 4758089 | Holographic interferometer | Takashi Yokokura, Takuji Satoh | 1988-07-19 |