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2020-02-25 |
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Method and device for measuring wavefront using light-exit section causing light amount distribution in at least one direction |
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Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method |
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Projection optical system inspecting method and inspection apparatus, and a projection optical system manufacturing method |
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Interferometer that measures aspherical surfaces |
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Interferometric apparatus and methods for measuring surface topography of a test surface |
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Apparatus and methods for detecting and correcting distortion of interference fringes |
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Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens |
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1999-04-27 |
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Interferometric surface profiler with an alignment optical member |
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1996-10-08 |
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Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop |
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Exposure method and apparatus using holographic techniques |
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1991-08-13 |
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Method of and apparatus for analyzing interference fringes |
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Holographic interferometer |
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