Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885558 | Interferometric apparatus for detecting 3D position of a diffracting object | Mikihiko Ishii, Tetsuya Koike | 2018-02-06 |
| 8416423 | Interferometric apparatus for detecting 3D position of a diffracting object | Mikihiko Ishii, Tetsuya Koike | 2013-04-09 |
| 5563706 | Interferometric surface profiler with an alignment optical member | Masato Shibuya, Yutaka Ichihara, Takashi Gemma, Shuji Toyonaga | 1996-10-08 |