| 6181469 |
Optical member for photolithography, method for evaluating optical member, and photolithography apparatus |
Hiroyuki Hiraiwa, Issey Tanaka |
2001-01-30 |
| 6025955 |
Optical member for photolithography, method for evaluating optical member, and photolithography apparatus |
Hiroyuki Hiraiwa, Issey Tanaka |
2000-02-15 |
| 6008904 |
Apparatus and methods for detecting and correcting distortion of interference fringes |
Mikihiko Ishii, Takashi Gemma |
1999-12-28 |
| 5619795 |
Method for designing an oil ring |
Ichiro Hirose |
1997-04-15 |
| 5417572 |
Method for extracting a margin line for designing an artificial crown |
Masaharu Kawai, Masami Baba |
1995-05-23 |
| 5369490 |
Contour measuring apparatus |
Masaharu Kawai, Masami Baba |
1994-11-29 |
