Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8427628 | Exposure apparatus, exposure method and device fabricating method | — | 2013-04-23 |
| 8130364 | Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method | Masato Kumazawa | 2012-03-06 |
| 6811953 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Masaki Kato, Motoo Koyama, Hiroshi Shirasu, Masahiro Iguchi | 2004-11-02 |