Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method

Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method

US Patent 8130364 · Granted Mar 6, 2012

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Microscope objective lens, microscope optical system, and microscope device2025
Projection optical system, exposure apparatus, exposure method, display manufact2014
Exposure apparatus, exposure method and device fabricating method2013
Projection optical system, exposure apparatus, exposure method, display manufact2012
Exposure apparatus, optical projection apparatus and a method for adjusting the 2008
Exposure apparatus, optical projection apparatus and a method for adjusting the 2008
Exposure apparatus, optical projection apparatus and a method for adjusting the 2006
Exposure apparatus, method for manufacturing therof, method for exposing and met2004
Exposure apparatus, optical projection apparatus and a method for adjusting the 2004
Exposure/imaging apparatus and method in which imaging characteristics of a proj2003
Aperture stop having central aperture region defined by a circular ARC and perip2003
Exposure apparatus and exposure method for transferring pattern onto a substrate2002