Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6325516 | Exposure apparatus and field stop thereof | Tomoyuki Watanabe, Masamitsu Yanagihara, Noritsugu Hanazaki | 2001-12-04 |
| 6213607 | Exposure apparatus and field stop thereof | Tomoyuki Watanabe, Masamitsu Yanagihara, Noritsugu Hanazaki | 2001-04-10 |
| 5936712 | Exposure method and apparatus including focus control | Masanobu Ito, Masamitsu Yanagihara, Yoshiyuki Katamata | 1999-08-10 |
| 5777722 | Scanning exposure apparatus and method | Seiji Miyazaki, Tsuyoshi Narabe, Kei Nara, Tomohide Hamada, Kazuaki Saiki +1 more | 1998-07-07 |
| 5502313 | Exposure apparatus and method having a measuring unit for measuring distances between a mask surface and a projection optical system | Osamu Nakamura, Masamitsu Yanagihara | 1996-03-26 |
| 5486896 | Exposure apparatus | Junji Hazama, Masamitsu Yanagihara, Masaichi Murakami | 1996-01-23 |