Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5999244 | Projection exposure apparatus, method for correcting positional discrepancy of projected image, and method for determining image formation characteristic of projection optical system | Masamitsu Yanagihara, Kei Hara, Seiji Miyazaki, Hideki Koitabashi, Yoichi Hamashima +1 more | 1999-12-07 |
| 5936712 | Exposure method and apparatus including focus control | Masanobu Ito, Masamitsu Yanagihara, Hideji Goto | 1999-08-10 |