Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6141082 | Alignment method, exposure method, and exposure apparatus | Kei Nara, Seiji Miyazaki | 2000-10-31 |
| 5999244 | Projection exposure apparatus, method for correcting positional discrepancy of projected image, and method for determining image formation characteristic of projection optical system | Masamitsu Yanagihara, Kei Hara, Seiji Miyazaki, Yoichi Hamashima, Hiroshi Kitano +1 more | 1999-12-07 |
| 5849441 | Alignment method utilizing plurality of marks, discriminable from each other, capable of effecting alignment individually | Kei Nara, Seiji Miyazaki | 1998-12-15 |
| 5640243 | Position detection method | Masamitsu Yanagihara, Junji Hazama | 1997-06-17 |
| 5500736 | Method of detecting positions | Masamitsu Yanagihara, Junji Hazama | 1996-03-19 |