Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583854 | Method and apparatus for the manufacture of circuits for a large display device using stitch exposure | Tohru Kiuchi | 2003-06-24 |
| 6211965 | Photolithographic position measuring laser interferometer with relitively moving measuring intereometer | Makoto Tsuchiya | 2001-04-03 |
| 5640243 | Position detection method | Hideki Koitabashi, Masamitsu Yanagihara | 1997-06-17 |
| 5500736 | Method of detecting positions | Hideki Koitabashi, Masamitsu Yanagihara | 1996-03-19 |
| 5486896 | Exposure apparatus | Masamitsu Yanagihara, Hideji Goto, Masaichi Murakami | 1996-01-23 |
| 5191374 | Exposure control apparatus | Kazuaki Suzuki, Tsunesaburo Uemura | 1993-03-02 |
| 4718767 | Method of inspecting the pattern on a photographic mask | — | 1988-01-12 |
| 4685805 | Small gap measuring apparatus | Kenichi Kodama, Akikazu Tanimoto, Hisao Izawa, Yoichi Hamashima | 1987-08-11 |
| 4636626 | Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication | Kinya Kato, Akikazu Tanimoto, Hisao Izawa | 1987-01-13 |
| 4589139 | Apparatus for detecting defects in pattern | Kazunari Hada, Norio Fujii, Toru Azuma, Kaoru Kikuchi | 1986-05-13 |
| 4537501 | Apparatus for the attitude control of plate-form body | Yukio Kakizaki, Hisao Izawa | 1985-08-27 |
| 4506382 | Apparatus for detecting two-dimensional pattern and method for transforming the pattern into binary image | Kazunari Hada, Norio Fujii, Atsushi Kawahara, Toru Azuma | 1985-03-19 |
| 4479145 | Apparatus for detecting the defect of pattern | Toru Azuma, Atsushi Kawahara, Kazunari Hada, Norio Fujii | 1984-10-23 |
| 4472738 | Pattern testing apparatus | Kazunari Hada, Norio Fujii, Atsushi Kawahara, Toru Azuma | 1984-09-18 |