Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6011612 | Processing apparatus using a laser light source | Masato Go | 2000-01-04 |
| 5383217 | Exposure apparatus with laser source requiring new gas introduction | — | 1995-01-17 |
| 5191374 | Exposure control apparatus | Junji Hazama, Kazuaki Suzuki | 1993-03-02 |
| 5010230 | Laser processor | — | 1991-04-23 |