Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6731377 | Laser output control method, laser apparatus and exposure apparatus | — | 2004-05-04 |
| 6603533 | Irradiation control method and apparatus for pulsed light source used in exposure apparatus | — | 2003-08-05 |
| 6011612 | Processing apparatus using a laser light source | Tsunesaburo Uemura | 2000-01-04 |
| 4970546 | Exposure control device | Kazuaki Suzuki, Akikazu Tanimoto | 1990-11-13 |