Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9939739 | Exposure apparatus and method for producing device | Naoyuki Kobayashi | 2018-04-10 |
| 9304392 | Exposure apparatus and method for producing device | Naoyuki Kobayashi | 2016-04-05 |
| 8780327 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2014-07-15 |
| 8760617 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2014-06-24 |
| 8384877 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2013-02-26 |
| 8174668 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2012-05-08 |
| 8169592 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2012-05-01 |
| 8130363 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2012-03-06 |
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2011-12-06 |
| 7876452 | Interferometric position-measuring devices and methods | Michael Sogard, Bausan Yuan, Masahiko Okumura, Yosuke Shirata, Kiyoshi Uchikawa +1 more | 2011-01-25 |
| 7388649 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa | 2008-06-17 |
| 6894763 | Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same | Seiro Murakami, Takaharu Miura, Yutaka Ichihara, Hideo Mizutani | 2005-05-17 |
| 6727980 | Apparatus and method for pattern exposure and method for adjusting the apparatus | Kazuya Ota, Tsuneyuki Hagiwara, Hideki Komatsuda, Takashi Mori | 2004-04-27 |
| 6713747 | Light exposure apparatus | — | 2004-03-30 |
| 6704088 | Environmental-control method and apparatus for an exposure system | — | 2004-03-09 |
| 5906901 | Alignment method and exposure apparatus for use in such alignment method | — | 1999-05-25 |
| 5831716 | Slit-scanning type light exposure apparatus | — | 1998-11-03 |
| 5663784 | Slit-scanning type light exposure apparatus | — | 1997-09-02 |
| 5656229 | Method for removing a thin film layer | Kiyoshi Motegi, Yukako Komaru | 1997-08-12 |
| 5597590 | Apparatus for removing a thin film layer | Kiyoshi Motegi, Yukako Komaru | 1997-01-28 |
| 5151749 | Method of and apparatus for measuring coordinate position and positioning an object | Saburo Kamiya | 1992-09-29 |
| 5048926 | Illuminating optical system in an exposure apparatus | — | 1991-09-17 |
| 5018848 | Laser beam transmitting apparatus | Saburo Kamiya | 1991-05-28 |
| 4970546 | Exposure control device | Kazuaki Suzuki, Masato Go | 1990-11-13 |
| 4884101 | Apparatus capable of adjusting the light amount | — | 1989-11-28 |