Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8941808 | Immersion lithographic apparatus rinsing outer contour of substrate with immersion space | Katsushi Nakano, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara | 2015-01-27 |
| 8780326 | Exposure apparatus, exposure method, and device manufacturing method | Tohru Kiuchi, Takeyuki Mizutani, Masahiro Nei, Masato Hamatani | 2014-07-15 |
| 8654306 | Exposure apparatus, cleaning method, and device fabricating method | Kenichi Shiraishi, Yosuke Shirata | 2014-02-18 |
| 8136472 | Indicator for pressure container | Junji YAMAUCHI, Yasuhito Hanaki, Kuniharu Iwamoto, Toshiaki Matsuno, Henry J. Kelm | 2012-03-20 |
| 8040489 | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid | Katsushi Nakano, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara | 2011-10-18 |
| 7876452 | Interferometric position-measuring devices and methods | Michael Sogard, Bausan Yuan, Yosuke Shirata, Kiyoshi Uchikawa, Saburo Kamiya +1 more | 2011-01-25 |
| 7068350 | Exposure apparatus and stage device, and device manufacturing method | Kenji Nishi, Hiroki Okuno | 2006-06-27 |
| 6842248 | System and method for calibrating mirrors of a stage assembly | Mike Binnard | 2005-01-11 |
| 6624433 | Method and apparatus for positioning substrate and the like | Kenji Nishi | 2003-09-23 |
| 6400445 | Method and apparatus for positioning substrate | Kenji Nishi, Yoshiki Kida | 2002-06-04 |
| 6225012 | Method for positioning substrate | Kenji Nishi, Yoshiki Kida | 2001-05-01 |
| 6141108 | Position control method in exposure apparatus | Yoshiki Kida | 2000-10-31 |
| 6122036 | Projection exposure apparatus and method | Shigeru Yamasaki | 2000-09-19 |
| 5985495 | Methods for measuring image-formation characteristics of a projection-optical system | Shinji Wakamoto | 1999-11-16 |
| 5798530 | Method and apparatus for aligning a mask and a set of substrates to be exposed | — | 1998-08-25 |
| 5654553 | Projection exposure apparatus having an alignment sensor for aligning a mask image with a substrate | Masaharu Kawakubo | 1997-08-05 |
| 5473424 | Tilting apparatus | — | 1995-12-05 |
| 5431456 | Pipe fitting | Noriyuki Moritani, Kazuki Nakamichi | 1995-07-11 |