Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9239524 | Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region | Hiroyuki Nagasaka | 2016-01-19 |
| 9025126 | Exposure apparatus adjusting method, exposure apparatus, and device fabricating method | Yosuke Shirata | 2015-05-05 |
| 8913224 | Exposure apparatus, exposure method, and device producing method | — | 2014-12-16 |
| 8035799 | Exposure apparatus, exposure method, and device producing method | — | 2011-10-11 |
| 7872476 | NMR probe | Hiroshi Ikeda, Hiroto Suematsu | 2011-01-18 |
| 7714579 | NMR probe | Hiroto Suematsu, Yoshiaki Yamakoshi, Hiroshi Ikeda, Tetsuo Miyamoto, Ryoji Tanaka | 2010-05-11 |
| 6900880 | Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method | Tsuneo Miyai | 2005-05-31 |
| 6680611 | Local signal-supplying device for NMR spectrometer | — | 2004-01-20 |
| 6577382 | Substrate transport apparatus and method | Kenji Nishi | 2003-06-10 |
| 6400445 | Method and apparatus for positioning substrate | Kenji Nishi, Masahiko Okumura | 2002-06-04 |
| 6225012 | Method for positioning substrate | Kenji Nishi, Masahiko Okumura | 2001-05-01 |
| 6141108 | Position control method in exposure apparatus | Masahiko Okumura | 2000-10-31 |