Issued Patents All Time
Showing 1–25 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387074 | Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method | — | 2022-07-12 |
| 10984982 | Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method | — | 2021-04-20 |
| 10209622 | Exposure method and device manufacturing method having lower scanning speed to expose peripheral shot area | — | 2019-02-19 |
| 10203614 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2019-02-12 |
| 10203608 | Exposure apparatus and device manufacturing method having lower scanning speed to expose peripheral shot area | — | 2019-02-12 |
| 10180632 | Exposure apparatus, exposure method, and method for producing device | — | 2019-01-15 |
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2018-10-02 |
| 9977352 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2018-05-22 |
| 9977336 | Exposure method, exposure apparatus, and method for producing device | — | 2018-05-22 |
| 9933708 | Exposure method, exposure apparatus, and method for producing device | — | 2018-04-03 |
| 9910369 | Exposure apparatus, exposure method, and device producing method | — | 2018-03-06 |
| 9891539 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2018-02-13 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9778580 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2017-10-03 |
| 9766555 | Exposure apparatus, exposure method, and method for producing device | Yasufumi Nishii | 2017-09-19 |
| 9746781 | Exposure apparatus and method for producing device | Hirotaka Kohno, Takeshi Okuyama, Katsushi Nakano | 2017-08-29 |
| 9599907 | Exposure apparatus and device manufacturing method | Hirotaka Kohno, Yasufumi Nishii | 2017-03-21 |
| 9588436 | Exposure apparatus, exposure method, and device producing method | — | 2017-03-07 |
| 9529273 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2016-12-27 |
| 9500959 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2016-11-22 |
| 9429851 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2016-08-30 |
| 9411247 | Exposure apparatus, exposure method, and method for producing device | Minoru Onda | 2016-08-09 |
| 9360763 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2016-06-07 |
| 9354525 | Exposure method, exposure apparatus, and method for producing device | — | 2016-05-31 |
| 9348239 | Exposure apparatus, exposure method, and method for producing device | — | 2016-05-24 |