Issued Patents All Time
Showing 51–75 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8692973 | Exposure apparatus and method for producing device | — | 2014-04-08 |
| 8570484 | Immersion exposure apparatus, device manufacturing method, cleaning method, and cleaning member to remove foreign substance using liquid | — | 2013-10-29 |
| 8508713 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2013-08-13 |
| 8488099 | Exposure apparatus and device manufacturing method | Hirotaka Kohno, Yasufumi Nishii | 2013-07-16 |
| 8482716 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2013-07-09 |
| 8472001 | Exposure method, exposure apparatus, and method for producing device | — | 2013-06-25 |
| 8390779 | Exposure apparatus, exposure method, and method for producing device | — | 2013-03-05 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8379189 | Stage device, exposure apparatus, exposure method and device manufacturing method | — | 2013-02-19 |
| 8373843 | Exposure apparatus, exposure method, and method for producing device | — | 2013-02-12 |
| 8345217 | Liquid recovery member, exposure apparatus, exposing method, and device fabricating method | — | 2013-01-01 |
| 8330934 | Exposure apparatus and device manufacturing method | Taro Yamamoto, Osamu Hirakawa | 2012-12-11 |
| 8253921 | Exposure apparatus and device fabricating method | Soichi Owa | 2012-08-28 |
| 8218127 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2012-07-10 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 8189168 | Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure method | Yasushi Yoda | 2012-05-29 |
| 8169591 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Ryu Sugawara | 2012-05-01 |
| 8134685 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | Yasufumi Nishii, Takeshi Okuyama | 2012-03-13 |
| 8102504 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2012-01-24 |
| 8089608 | Exposure apparatus, exposure method, and device manufacturing method | Kenichi Shiraishi, Tomoharu Fujiwara, Soichi Owa, Akihiro Miwa | 2012-01-03 |
| 8064037 | Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure | Yuuki Ishii, Susumu Makinouchi | 2011-11-22 |
| 8064044 | Exposure apparatus, exposure method, and device producing method | — | 2011-11-22 |
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2011-11-08 |
| 8027020 | Exposure apparatus, exposure method, and method for producing device | — | 2011-09-27 |
| 8004651 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | — | 2011-08-23 |