Issued Patents All Time
Showing 76–100 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7932991 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-04-26 |
| 7932994 | Exposure apparatus, exposure method, and method for producing device | — | 2011-04-26 |
| 7924402 | Exposure apparatus and device manufacturing method | Taro Yamamoto, Osamu Hirakawa | 2011-04-12 |
| 7914972 | Exposure method and device manufacturing method | Tomoharu Fujiwara | 2011-03-29 |
| 7916270 | Exposure apparatus, exposure method, and device manufacturing method | — | 2011-03-29 |
| 7911583 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-03-22 |
| 7907254 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-03-15 |
| 7907253 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2011-03-15 |
| 7855777 | Exposure apparatus and method for manufacturing device | — | 2010-12-21 |
| 7852456 | Exposure apparatus, exposure method, and method for producing device | — | 2010-12-14 |
| 7803516 | Exposure method, device manufacturing method using the same, exposure apparatus, and substrate processing method and apparatus | — | 2010-09-28 |
| 7782442 | Exposure apparatus, exposure method, projection optical system and device producing method | — | 2010-08-24 |
| 7769092 | Ultra wideband radio transmitter, ultra wideband radio receiver, and ultra wideband radio communication method | — | 2010-08-03 |
| 7714982 | Exposure apparatus, exposure method, and device manufacturing method | — | 2010-05-11 |
| 7705968 | Plate member, substrate holding device, exposure apparatus and method, and device manufacturing method | Tomoharu Fujiwara | 2010-04-27 |
| 7697110 | Exposure apparatus and device manufacturing method | Taro Yamamoto, Osamu Hirakawa | 2010-04-13 |
| 7580114 | Exposure apparatus and method for manufacturing device | — | 2009-08-25 |
| 7542128 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2009-06-02 |
| 7535550 | Exposure apparatus, exposure method, and method for producing device | — | 2009-05-19 |
| 7515246 | Exposure apparatus, exposure method, and method for producing device | Nobutaka Magome | 2009-04-07 |
| 7508490 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2009-03-24 |
| 7483119 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue | 2009-01-27 |
| 7466392 | Exposure apparatus, exposure method, and method for producing device | Nobutaka Magome | 2008-12-16 |
| 7453550 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasugumi Nishii | 2008-11-18 |
| 7399979 | Exposure method, exposure apparatus, and method for producing device | — | 2008-07-15 |