Issued Patents All Time
Showing 26–50 of 109 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310696 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2016-04-12 |
| 9285684 | Exposure method, exposure apparatus, and method for producing device | — | 2016-03-15 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9256137 | Exposure apparatus, liquid holding method, and device manufacturing method | — | 2016-02-09 |
| 9239524 | Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion region | Yoshiki Kida | 2016-01-19 |
| 9182684 | Exposure apparatus, exposure method, and method for producing device | Yasufumi Nishii | 2015-11-10 |
| 9182685 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2015-11-10 |
| 9134621 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2015-09-15 |
| 9097988 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2015-08-04 |
| 9063436 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Ryu Sugawara | 2015-06-23 |
| 9019469 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroaki Takaiwa, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2015-04-28 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2015-04-28 |
| 9013675 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | Yasufumi Nishii, Takeshi Okuyama | 2015-04-21 |
| 8982322 | Exposure apparatus and device manufacturing method | — | 2015-03-17 |
| 8891059 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method | — | 2014-11-18 |
| 8879043 | Exposure apparatus and method for manufacturing device | — | 2014-11-04 |
| 8854601 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Takaya Okada | 2014-10-07 |
| 8810767 | Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device | Kenichi Shiraishi, Soichi Owa, Shigeru Hirukawa | 2014-08-19 |
| 8797505 | Exposure apparatus and device manufacturing method | Takeshi Okuyama | 2014-08-05 |
| 8736809 | Exposure apparatus, exposure method, and method for producing device | Soichi Owa, Yasufumi Nishii | 2014-05-27 |
| 8724077 | Exposure apparatus, exposure method, and device manufacturing method | Kenichi Shiraishi, Tomoharu Fujiwara, Soichi Owa, Akihiro Miwa | 2014-05-13 |
| 8721803 | Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating method | Hiroshi Morita, Hiroto Tokoshima | 2014-05-13 |
| 8717533 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2014-05-06 |
| 8704999 | Exposure apparatus, exposure method, and method for producing device | Takeshi Okuyama | 2014-04-22 |
| 8698998 | Exposure apparatus, method for cleaning member thereof, maintenance method for exposure apparatus, maintenance device, and method for producing device | Kenichi Shiraishi, Soichi Owa, Shigeru Hirukawa | 2014-04-15 |