Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Hitoshi Ishizawa | 2018-10-02 |
| 9618854 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Tomoharu Fujiwara | 2017-04-11 |
| 9335639 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Tomoharu Fujiwara | 2016-05-10 |
| 9182685 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Hitoshi Ishizawa | 2015-11-10 |
| 9019469 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Hitoshi Ishizawa | 2015-04-28 |
| 8724075 | Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice | Takao Kokubun | 2014-05-13 |
| 8064039 | Exposure method, exposure apparatus, and device manufacturing method | Kenichi Shiraishi, Tomoharu Fujiwara | 2011-11-22 |
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Hiroaki Takaiwa, Shigeru Hirukawa, Hitoshi Ishizawa | 2011-11-08 |
| 7812926 | Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice | Takao Kokubun | 2010-10-12 |