Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10175584 | Optical element and exposure apparatus | Takeshi Shirai, Hitoshi Ishizawa, Atsunobu Murakami | 2019-01-08 |
| 9046796 | Optical element and exposure apparatus | Takeshi Shirai, Hitoshi Ishizawa, Atsunobu Murakami | 2015-06-02 |
| 8724075 | Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice | Ryuichi Hoshika | 2014-05-13 |
| 8189170 | Optical element and exposure apparatus | Takeshi Shirai, Hitoshi Ishizawa, Atsunobu Murakami | 2012-05-29 |
| 8149381 | Optical element and exposure apparatus | Takeshi Shirai, Hitoshi Ishizawa, Atsunobu Murakami | 2012-04-03 |
| 7993008 | Optical element and exposure apparatus | Takeshi Shirai, Hitoshi Ishizawa, Atsunobu Murakami | 2011-08-09 |
| 7812926 | Optical element, exposure apparatus based on the use of the same, exposure method, and method for producing microdevice | Ryuichi Hoshika | 2010-10-12 |
| 7697111 | Optical element and exposure apparatus | Takeshi Shirai, Hitoshi Ishizawa, Atsunobu Murakami | 2010-04-13 |