Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151983 | Exposure apparatus and device manufacturing method | Takashi Horiuchi | 2018-12-11 |
| 10088760 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2018-10-02 |
| 10012909 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2018-07-03 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9341959 | Substrate holding device, exposure apparatus, and device manufacturing method | Makoto Shibuta, Yuichi Yoshida | 2016-05-17 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9223224 | Exposure apparatus with component from which liquid is protected and/or removed and device fabricating method | Hideaki Hara | 2015-12-29 |
| 9182685 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2015-11-10 |
| 9041901 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2015-05-26 |
| 9041906 | Immersion exposure apparatus and method that detects liquid adhered to rear surface of substrate | Takashi Horiuchi | 2015-05-26 |
| 9019469 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2015-04-28 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2015-04-28 |
| 8867017 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2014-10-21 |
| 8854599 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2014-10-07 |
| 8767168 | Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table after exposure | Takashi Horiuchi | 2014-07-01 |
| 8749757 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Nobutaka Magome, Naoyuki Kobayashi, Yasuyuki Sakakibara, Hisatsune Kadota | 2014-06-10 |
| 8749755 | Stage apparatus and exposure apparatus | — | 2014-06-10 |
| 8508718 | Wafer table having sensor for immersion lithography | Andrew J. Hazelton | 2013-08-13 |
| 8488101 | Immersion exposure apparatus and method that detects residual liquid on substrate held by substrate table on way from exposure position to unload position | Takashi Horiuchi | 2013-07-16 |
| 8451424 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Nobutaka Magome, Naoyuki Kobayashi, Yasuyuki Sakakibara, Hisatsune Kadota | 2013-05-28 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 8102512 | Substrate holding device, exposure apparatus, and device manufacturing method | Makoto Shibuta, Yuichi Yoshida | 2012-01-24 |
| 8054447 | Exposure apparatus, exposure method, method for producing device, and optical part | Hiroyuki Nagasaka, Shigeru Hirukawa, Ryuichi Hoshika, Hitoshi Ishizawa | 2011-11-08 |
| 8034539 | Exposure apparatus and method for producing device | Nobutaka Magome, Dai Arai | 2011-10-11 |