Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964860 | Substrate holding apparatus, exposure apparatus, and device fabricating method | — | 2018-05-08 |
| 9904182 | Exposure apparatus | — | 2018-02-27 |
| 9690206 | Substrate holding apparatus, exposure apparatus, and device fabricating method | — | 2017-06-27 |
| 9470984 | Exposure apparatus | — | 2016-10-18 |
| 9341959 | Substrate holding device, exposure apparatus, and device manufacturing method | Yuichi Yoshida, Hiroaki Takaiwa | 2016-05-17 |
| 9250537 | Immersion exposure apparatus and method with detection of liquid on members of the apparatus | — | 2016-02-02 |
| 9224632 | Substrate holding apparatus, exposure apparatus, and device fabricating method | — | 2015-12-29 |
| 8456609 | Exposure apparatus and device manufacturing method | — | 2013-06-04 |
| 8384874 | Immersion exposure apparatus and device manufacturing method to detect if liquid on base member | — | 2013-02-26 |
| 8368870 | Exposure apparatus and device manufacturing method | — | 2013-02-05 |
| 8102512 | Substrate holding device, exposure apparatus, and device manufacturing method | Yuichi Yoshida, Hiroaki Takaiwa | 2012-01-24 |
| 8089615 | Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method | Takeyuki Mizutani, Yuichi Shibazaki | 2012-01-03 |
| 7456929 | Exposure apparatus and device manufacturing method | — | 2008-11-25 |