Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958785 | Exposure apparatus, exposure method, and method for producing device | — | 2018-05-01 |
| 8941808 | Immersion lithographic apparatus rinsing outer contour of substrate with immersion space | Katsushi Nakano, Masahiko Okumura, Tarou Sugihara, Tomoharu Fujiwara | 2015-01-27 |
| 8780326 | Exposure apparatus, exposure method, and device manufacturing method | Tohru Kiuchi, Masahiro Nei, Masato Hamatani, Masahiko Okumura | 2014-07-15 |
| 8675174 | Exposure apparatus, exposure method, and method for producing device | — | 2014-03-18 |
| 8089615 | Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method | Yuichi Shibazaki, Makoto Shibuta | 2012-01-03 |
| 8040489 | Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid | Katsushi Nakano, Masahiko Okumura, Tarou Sugihara, Tomoharu Fujiwara | 2011-10-18 |