Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342206 | Substrate case and substrate accommodation apparatus | Hideo Mizutani, Toru Kawaguchi, Takashi MASUKAWA | 2022-05-24 |
| 11073767 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2021-07-27 |
| 10691027 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2020-06-23 |
| 10591827 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2020-03-17 |
| 10541160 | Substrate case and substrate accommodation apparatus | Hideo Mizutani, Toru Kawaguchi, Takashi MASUKAWA | 2020-01-21 |
| 10527945 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2020-01-07 |
| 10156795 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2018-12-18 |
| 10007190 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2018-06-26 |
| 9651868 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2017-05-16 |
| 9193560 | Leader member, substrate, substrate cartridge, substrate-processing apparatus, leader-connecting method, method of manufacturing display element, and apparatus for manufacturing display element | Tomohide Hamada | 2015-11-24 |
| 9178155 | Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display element | Kei Nara, Tomohide Hamada, Masaki Kato | 2015-11-03 |
| 9152062 | Pattern forming device, pattern forming method, and device manufacturing method | Hideo Mizutani | 2015-10-06 |
| 9072210 | Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element | — | 2015-06-30 |
| 8922748 | Exposure apparatus, exposure method, and device manufacturing method | — | 2014-12-30 |
| 8801307 | Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element | — | 2014-08-12 |
| 8780326 | Exposure apparatus, exposure method, and device manufacturing method | Takeyuki Mizutani, Masahiro Nei, Masato Hamatani, Masahiko Okumura | 2014-07-15 |
| 8743341 | Immersion exposure apparatus and immersion exposure method, and device manufacturing method | — | 2014-06-03 |
| 8605249 | Exposure apparatus, exposure method, and device manufacturing method | Hideya Inoue | 2013-12-10 |
| 8508714 | Exposure apparatus, exposure method, and method for producing device | — | 2013-08-13 |
| 8440375 | Exposure method and electronic device manufacturing method | Naomasa Shiraishi, Hideya Inoue | 2013-05-14 |
| 8399263 | Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate | Hideo Mizutani | 2013-03-19 |
| 8384875 | Exposure apparatus, exposure method, and method for producing device | Yasuhiro Hidaka, Tadashi Nagayama | 2013-02-26 |
| 8379186 | Pattern formation apparatus, pattern formation method, and device manufacturing method | Hideo Mizutani | 2013-02-19 |
| 8289500 | Exposure apparatus, exposure method, and device manufacturing method | — | 2012-10-16 |
| 8264666 | Exposure apparatus, exposure method, and method of manufacturing device | Hideo Mizutani | 2012-09-11 |