Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8235695 | Pattern forming device, pattern forming method, and device manufacturing method | Hideo Mizutani | 2012-08-07 |
| 8040490 | Liquid immersion exposure apparatus, exposure method, and method for producing device | — | 2011-10-18 |
| 8013975 | Exposure apparatus, exposure method, and method for producing device | — | 2011-09-06 |
| 7872730 | Immersion exposure apparatus and immersion exposure method, and device manufacturing method | — | 2011-01-18 |
| 7573052 | Exposure apparatus, exposure method, and device manufacturing method | Hideya Inoue | 2009-08-11 |
| 7433019 | Exposure apparatus and device manufacturing method | Toshihiro Miyake | 2008-10-07 |
| 7220160 | Gun grip controller | — | 2007-05-22 |
| RE38320 | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system | Kenji Nishi, Kazuo Ushida, Seiro Murakami, Yasuaki Tanaka | 2003-11-18 |
| 6583854 | Method and apparatus for the manufacture of circuits for a large display device using stitch exposure | Junji Hazama | 2003-06-24 |
| 5883704 | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system | Kenji Nishi, Kazuo Ushida, Seiro Murakami, Yasuaki Tanaka | 1999-03-16 |
| 5872618 | Projection exposure apparatus | Tadashi Nagayama, Yuuki Ishii, Masahiro Nei | 1999-02-16 |
| 5583609 | Projection exposure apparatus | Hideo Mizutani | 1996-12-10 |
| 5162789 | Fluorescent indicator apparatus | Mitutosi Moriya, Koji Hasebe, Nobuharu Kobayashi | 1992-11-10 |