| 6894763 |
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same |
Takaharu Miura, Akikazu Tanimoto, Yutaka Ichihara, Hideo Mizutani |
2005-05-17 |
| RE38320 |
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system |
Kenji Nishi, Kazuo Ushida, Tohru Kiuchi, Yasuaki Tanaka |
2003-11-18 |
| 6608681 |
Exposure method and apparatus |
Yasuaki Tanaka, Kenji Nishi |
2003-08-19 |
| RE38113 |
Method of driving mask stage and method of mask alignment |
Kenji Nishi |
2003-05-06 |
| 6433872 |
Exposure method and apparatus |
Kenji Nishi, Yasuaki Tanaka |
2002-08-13 |
| 5883704 |
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system |
Kenji Nishi, Kazuo Ushida, Tohru Kiuchi, Yasuaki Tanaka |
1999-03-16 |
| 5739899 |
Projection exposure apparatus correcting tilt of telecentricity |
Kenji Nishi, Hiroshi Chiba |
1998-04-14 |
| 5693439 |
Exposure method and apparatus |
Yasuaki Tanaka, Kenji Nishi |
1997-12-02 |
| 5464715 |
Method of driving mask stage and method of mask alignment |
Kenji Nishi |
1995-11-07 |
| 5448332 |
Exposure method and apparatus |
Yasuyuki Sakakibara, Yasuaki Tanaka, Kenji Nishi |
1995-09-05 |
| 4860374 |
Apparatus for detecting position of reference pattern |
Akikazu Tanimoto, Susumu Makinouchi, Hidemi Kawai, Masaichi Murakami |
1989-08-22 |
| 4702606 |
Position detecting system |
Toshio Matsuura, Yuji Imai, Kazuya Ohta, Akikazu Tanimoto |
1987-10-27 |
| 4677301 |
Alignment apparatus |
Akikazu Tanimoto, Toshio Matsuura, Makoto Uehara, Kyoichi Suwa |
1987-06-30 |
| 4655598 |
Position detection method and apparatus |
Toshio Matsuura, Yuji Imai, Kazuya Ohta |
1987-04-07 |
| 4639604 |
Method and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signals |
Muneki Hamajima |
1987-01-27 |