MH

Masato Hamatani

NI Nikon: 11 patents #395 of 2,493Top 20%
SG Siemens Audiologische Technik Gmbh: 1 patents #99 of 180Top 60%
SO Sony: 1 patents #17,262 of 25,231Top 70%
Overall (All Time): #421,738 of 4,157,543Top 15%
12
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8920569 Pollutant removal method and apparatus, and exposure method and apparatus Shunji Watanabe, Tatsuya Kitamoto 2014-12-30
8780326 Exposure apparatus, exposure method, and device manufacturing method Tohru Kiuchi, Takeyuki Mizutani, Masahiro Nei, Masahiko Okumura 2014-07-15
7215408 Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system Toshio Tsukakoshi 2007-05-08
6961115 Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system Toshio Tsukakoshi 2005-11-01
6686989 Exposure apparatus Shigeru Hagiwara 2004-02-03
RE37309 Scanning exposure apparatus Toshiharu Nakashima, Ken Ozawa 2001-08-07
6222610 Exposure apparatus Shigeru Hagiwara 2001-04-24
6215808 Laser apparatus, exposure apparatus, lithography system, method for producing circuit elements, gas supply system and gas supply method Shinobu Atsumi 2001-04-10
6128030 Semiconductor exposure device Hiroki Kikuchi, Yushi Kaneda 2000-10-03
5760408 Semiconductor exposure device Hiroki Kikuchi, Yushi Kaneda 1998-06-02
5534970 Scanning exposure apparatus Toshiharu Nakashima, Ken Ozawa 1996-07-09
5425045 Short wavelength laser optical apparatus 1995-06-13