Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11712189 | Dipole group quantification method and dipole group display system | Ryoji HIRANO, Masayuki Hirata, Miyako ASAI | 2023-08-01 |
| 9321092 | Method for forming steel sheet by hot pressing | Tekkan Takasue, Kyousou Ishida, Kouji Hironaka, Takuya Yamazaki, Kenichi Hatakeyama +2 more | 2016-04-26 |
| 7102731 | Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method | Shigeru Hirukawa, Kenji Higashi | 2006-09-05 |
| 7088426 | Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing method | Shigeru Hirukawa, Kenji Higashi | 2006-08-08 |
| 6710846 | Environmental control apparatus for exposure apparatus | — | 2004-03-23 |
| 6281965 | Exposure method and exposure system using the exposure method | — | 2001-08-28 |
| RE37309 | Scanning exposure apparatus | Masato Hamatani, Ken Ozawa | 2001-08-07 |
| 6208406 | Environmental control apparatus for exposure apparatus | — | 2001-03-27 |
| 5976738 | Exposure and alignment method | — | 1999-11-02 |
| 5534970 | Scanning exposure apparatus | Masato Hamatani, Ken Ozawa | 1996-07-09 |