Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7215408 | Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system | Masato Hamatani | 2007-05-08 |
| 7075651 | Image forming characteristics measuring method, image forming characteristics adjusting method, exposure method and apparatus, program and storage medium, and device manufacturing method | — | 2006-07-11 |
| 6961115 | Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer system | Masato Hamatani | 2005-11-01 |
| 6296977 | Method for the measurement of aberration of optical projection system | Koji Kaise, Tsunehito Hayashi | 2001-10-02 |